Inventor
KUWABARA SUSUMU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KUWABARA SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
8 patentsUS6596610B1Jul 22, 2003
Method for reclaiming delaminated wafer and reclaimed delaminated wafer
SHINETSU HANDOTAI KK108 citations97
US6846718B1Jan 25, 2005
Method for producing SOI wafer and SOI wafer
SHINETSU HANDOTAI KK42 citations92
US6720640B2Apr 13, 2004
Method for reclaiming delaminated wafer and reclaimed delaminated wafer
SHINETSU HANDOTAI KK25 citations92
US5321264AJun 14, 1994
Method for evaluating surface state of silicon wafer
SHINETSU HANDOTAI KK14 citations73
US7176102B2Feb 13, 2007
Method for producing SOI wafer and SOI wafer
SHINETSU HANDOTAI KK8 citations70
US9279665B2Mar 8, 2016
Method for measuring film thickness distribution
SHINETSU HANDOTAI KK2 citations61
US10115580B2Oct 30, 2018
Method for manufacturing an SOI wafer
SHINETSU HANDOTAI KK0 citations51
US11965730B2Apr 23, 2024
Method for measuring film thickness distribution of wafer with thin films
SHINETSU HANDOTAI KK0 citations44
KUWABARA SUSUMU
4 patentsUS8976369B2Mar 10, 2015
Method for evaluating thin-film-formed wafer
KUWABARA SUSUMU2 citations60
US8741741B2Jun 3, 2014
Method for designing SOI wafer and method for manufacturing SOI wafer
KUWABARA SUSUMU3 citations60
US8311771B2Nov 13, 2012
Inspection method of SOI wafer
KUWABARA SUSUMU1 citations49
US8981291B2Mar 17, 2015
Method for measuring film thickness of SOI layer of SOI wafer
KUWABARA SUSUMU0 citations39