Inventor
BOOTS HENRI MARIE JOSEPH
NL8 patents
⚠️ This page may combine multiple inventors who share the name “BOOTS HENRI MARIE JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS9235125B2Jan 12, 2016
Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithography
ASML NETHERLANDS BV4 citations70
US10551736B2Feb 4, 2020
Methods for providing lithography features on a substrate by self-assembly of block copolymers
ASML NETHERLANDS BV1 citations60
US10240250B2Mar 26, 2019
Method to provide a patterned orientation template for a self-assemblable polymer
ASML NETHERLANDS BV1 citations58