Inventor
AMON JUERGEN
DE5 patents
Patents
5 patentsUS6368940B1Apr 9, 2002
Method for fabricating a microelectronic structure
INFINEON TECHNOLOGIES AG18 citations81
US7259060B2Aug 21, 2007
Method for fabricating a semiconductor structure
INFINEON TECHNOLOGIES AG3 citations62
US6967133B2Nov 22, 2005
Method for fabricating a semiconductor structure
INFINEON TECHNOLOGIES AG4 citations62
US7473953B2Jan 6, 2009
Method for fabricating metallic bit-line contacts
INFINEON TECHNOLOGIES AG0 citations48
US7326985B2Feb 5, 2008
Method for fabricating metallic bit-line contacts
INFINEON TECHNOLOGIES AG0 citations48