Inventor

KIRSCH PAUL D

US4 patents

⚠️ This page may combine multiple inventors who share the name “KIRSCH PAUL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents

US6930060B2Aug 16, 2005

Method for forming a uniform distribution of nitrogen in silicon oxynitride gate dielectric

IBM90 citations94

US7335969B2Feb 26, 2008

Method of monitoring introduction of interfacial species

IBM1 citations44

US6929964B2Aug 16, 2005

Method of monitoring introduction on interfacial species

IBM0 citations44

PARK CHANRO

1 patent

US8432020B2Apr 30, 2013

Capacitors, systems, and methods

PARK CHANRO3 citations55