Inventor
VINK JACOB WILLEM
NL5 patents
Patents
5 patentsUS7078715B2Jul 18, 2006
Lithographic apparatus and apparatus adjustment method
ASML NETHERLANDS BV24 citations91
US7999912B2Aug 16, 2011
Lithographic apparatus and sensor calibration method
ASML NETHERLANDS BV7 citations81
US7405810B2Jul 29, 2008
Method and apparatus for positioning a substrate on a substrate table
ASML NETHERLANDS BV3 citations59
US7978307B2Jul 12, 2011
Gas bearing, and lithographic apparatus provided with such a bearing
ASML NETHERLANDS BV0 citations48
US7639345B2Dec 29, 2009
Lithographic apparatus
ASML NETHERLANDS BV0 citations48