Inventor
RUE CHAD
US28 patents
⚠️ This page may combine multiple inventors who share the name “RUE CHAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
18 patentsUS9064811B2Jun 23, 2015
Precursor for planar deprocessing of semiconductor devices using a focused ion beam
FEI CO12 citations84
US9443697B2Sep 13, 2016
Low energy ion beam etch
FEI CO3 citations73
US9983152B1May 29, 2018
Material characterization using ion channeling imaging
FEI CO2 citations72
US10546719B2Jan 28, 2020
Face-on, gas-assisted etching for plan-view lamellae preparation
FEI CO2 citations68
US10190953B2Jan 29, 2019
Tomography sample preparation systems and methods with improved speed, automation, and reliability
FEI CO2 citations66
US12488957B2Dec 2, 2025
Crenellated sample holder and sputter target for sample preparation in cryo electron microscopy applications
FEI CO0 citations62
US8358832B2Jan 22, 2013
High accuracy beam placement for local area navigation
FEI CO3 citations61
US11069523B2Jul 20, 2021
Method of material deposition
FEI CO0 citations60
US11062879B2Jul 13, 2021
Face-on, gas-assisted etching for plan-view lamellae preparation
FEI CO0 citations57
US11798804B2Oct 24, 2023
Method of material deposition
FEI CO0 citations56
US11651924B1May 16, 2023
Method of producing microrods for electron emitters, and associated microrods and electron emitters
FEI CO1 citations56
US11735404B2Aug 22, 2023
Method, device and system for the treatment of biological cryogenic samples by plasma focused ion beams
FEI CO0 citations55
US9761467B2Sep 12, 2017
Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam
FEI CO0 citations52
US9978586B2May 22, 2018
Method of material deposition
FEI CO0 citations50
US9087366B2Jul 21, 2015
High accuracy beam placement for local area navigation
FEI CO1 citations49
US10325754B2Jun 18, 2019
Ion implantation to alter etch rate
FEI CO0 citations48
US10930514B2Feb 23, 2021
Method and apparatus for the planarization of surfaces
FEI CO0 citations41
US10347463B2Jul 9, 2019
Enhanced charged particle beam processes for carbon removal
FEI CO0 citations35
IBM
6 patentsUS7119333B2Oct 10, 2006
Ion detector for ion beam applications
IBM34 citations91
US7351966B1Apr 1, 2008
High-resolution optical channel for non-destructive navigation and processing of integrated circuits
IBM11 citations82
US6900137B2May 31, 2005
Dry etch process to edit copper lines
IBM10 citations68
US7781733B2Aug 24, 2010
In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques
IBM2 citations61
US6946064B2Sep 20, 2005
Sample mount for performing sputter-deposition in a focused ion beam (FIB) tool
IBM3 citations60
US6843893B2Jan 18, 2005
Metal dry etch using electronic field
IBM0 citations51