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Inventor
AU HENRY H
US
2 patents
⚠️ This page may combine multiple inventors who share the name “AU HENRY H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
1 patent
US7601050B2
Oct 13, 2009
Polishing apparatus with grooved subpad
APPLIED MATERIALS INC
11 citations
82
(unassigned)
1 patent
US6051844A
Apr 18, 2000
Scanning system for rapid thermal cycle stress/curvature measurement
8 citations
63