Inventor
MARASCHIN ROBERT
US6 patents
⚠️ This page may combine multiple inventors who share the name “MARASCHIN ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS5805408ASep 8, 1998
Electrostatic clamp with lip seal for clamping substrates
LAM RES CORP86 citations94
US7862693B2Jan 4, 2011
Apparatus for plating semiconductor wafers
LAM RES CORP4 citations62
US7648616B1Jan 19, 2010
Apparatus and method for semiconductor wafer electroplanarization
LAM RES CORP2 citations62
US7811423B2Oct 12, 2010
Proximity processing using controlled batch volume with an integrated proximity head
LAM RES CORP2 citations60
US7645364B2Jan 12, 2010
Apparatus and method for plating semiconductor wafers
LAM RES CORP1 citations51