Inventor
DESCHNER RYAN P
US3 patents
Patents
3 patentsUS7926006B2Apr 12, 2011
Variable fill and cheese for mitigation of BEOL topography
IBM4 citations60
US7651947B2Jan 26, 2010
Mask forming and implanting methods using implant stopping layer and mask so formed
IBM4 citations60
US7998871B2Aug 16, 2011
Mask forming and implanting methods using implant stopping layer
IBM0 citations50