Inventor
MATSUMARU SYOGO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMARU SYOGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
6 patentsUS7723007B2May 25, 2010
Polymer compound, photoresist composition including the polymer compound, and resist pattern formation method
TOKYO OHKA KOGYO CO LTD5 citations62
US7700259B2Apr 20, 2010
Polymer compound, photoresist composition containing such polymer compound, and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations62
US7682770B2Mar 23, 2010
Resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD2 citations62
US7592122B2Sep 22, 2009
Photoresist composition, and low-molecular compound and high-molecular compound for the photoresist composition
TOKYO OHKA KOGYO CO LTD3 citations62
US7807328B2Oct 5, 2010
Polymer compound, photoresist composition including the polymer compound, and resist pattern formation method
TOKYO OHKA KOGYO CO LTD0 citations51
US7763412B2Jul 27, 2010
Polymer, positive resist composition and method for forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations41