Inventor
RYU JU-A
KR2 patents
Patents
2 patentsUS8027017B2Sep 27, 2011
Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath
SAMSUNG ELECTRONICS CO LTD5 citations55
US7914594B2Mar 29, 2011
Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same
SAMSUNG ELECTRONICS CO LTD0 citations49