Inventor
HA HUN-HWAN
KR3 patents
Patents
3 patentsUS6398430B1Jun 4, 2002
Semiconductor device fabrication system
SAMSUNG ELECTRONICS CO LTD19 citations90
US6358672B2Mar 19, 2002
Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist
SAMSUNG ELECTRONICS CO LTD24 citations90
US8027017B2Sep 27, 2011
Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath
SAMSUNG ELECTRONICS CO LTD5 citations55