Inventor
YOON KYONG HO
KR11 patents
⚠️ This page may combine multiple inventors who share the name “YOON KYONG HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHEIL IND INC
4 patentsUS7981594B2Jul 19, 2011
Hardmask composition having antirelective properties and method of patterning material on susbstrate using the same
CHEIL IND INC19 citations92
US7862990B2Jan 4, 2011
Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer
CHEIL IND INC12 citations83
US7655386B2Feb 2, 2010
Polymer having antireflective properties, hardmask composition including the same, process for forming a patterned material layer, and associated device
CHEIL IND INC9 citations83
US7659051B2Feb 9, 2010
Polymer having antireflective properties, hardmask composition including the same, and process for forming a patterned material layer
CHEIL IND INC4 citations62
YOON KYONG HO
2 patentsUS8445187B2May 21, 2013
Hardmask composition having antireflective properties and method of patterning material on substrate using the same
YOON KYONG HO16 citations91
US8263321B2Sep 11, 2012
Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer
YOON KYONG HO4 citations60