Inventor
SONG JEE YUN
KR9 patents
⚠️ This page may combine multiple inventors who share the name “SONG JEE YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONG JEE-YUN
2 patentsUS9018776B2Apr 28, 2015
Hardmask composition including aromatic ring-containing compound, method of forming patterns, and semiconductor integrated circuit device including the patterns
SONG JEE-YUN20 citations89
US9116429B2Aug 25, 2015
Resist underlayer polymer, resist underlayer composition including the same, and method of patterning using the same
SONG JEE-YUN3 citations60
KIM MIN-SOO
2 patentsUS8741540B2Jun 3, 2014
Hard mask composition, method of forming a pattern, and semiconductor integrated circuit device including the pattern
KIM MIN-SOO10 citations83
US8415424B2Apr 9, 2013
Aromatic ring-containing polymer for underlayer of resist and resist underlayer composition including the same
KIM MIN-SOO2 citations62
CHO SUNG-WOOK
2 patentsUS8637219B2Jan 28, 2014
Aromatic ring-containing compound for a resist underlayer and resist underlayer composition
CHO SUNG-WOOK6 citations69
US8617792B2Dec 31, 2013
Aromatic ring-containing polymer for resist underlayer, resist underlayer composition including the same, and method of patterning device using the same
CHO SUNG-WOOK0 citations48