Inventor
SUMIYOSHI YUHEI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SUMIYOSHI YUHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
12 patentsUS7215410B2May 8, 2007
Exposure apparatus
CANON KK49 citations95
US6014455AJan 11, 2000
Projection exposure apparatus and device manufacturing method
CANON KK55 citations95
US7006194B2Feb 28, 2006
Projection optical system, exposure apparatus and method using the same
CANON KK25 citations92
US6256086B1Jul 3, 2001
Projection exposure apparatus, and device manufacturing method
CANON KK29 citations91
US10545413B2Jan 28, 2020
Evaluation method, exposure method, and method for manufacturing an article
CANON KK5 citations68
US11656554B2May 23, 2023
Exposure apparatus, exposure method, and method of manufacturing article
CANON KK0 citations62
US12105430B2Oct 1, 2024
Exposure apparatus, exposure method, and manufacturing method for product
CANON KK0 citations61
US11835863B2Dec 5, 2023
Exposure apparatus, exposure method, and manufacturing method for product
CANON KK0 citations61
US7408620B2Aug 5, 2008
Exposure apparatus
CANON KK2 citations61
US7403262B2Jul 22, 2008
Projection optical system and exposure apparatus having the same
CANON KK1 citations51
US7365826B2Apr 29, 2008
Projection optical system, exposure apparatus and method using the same
CANON KK0 citations51
US10191394B2Jan 29, 2019
Distortion detection method, exposure apparatus, exposure method, and device manufacturing method
CANON KK0 citations40
SUMIYOSHI YUHEI
3 patentsUS8760618B2Jun 24, 2014
Projection optical system, exposure apparatus and device manufacturing method
SUMIYOSHI YUHEI3 citations59
US8437004B2May 7, 2013
Detection apparatus
SUMIYOSHI YUHEI0 citations43
US8477286B2Jul 2, 2013
Projection optical system, exposure apparatus, and device manufacturing method
SUMIYOSHI YUHEI0 citations38