Inventor
HAYASHI TAKEHIDE
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI TAKEHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
6 patentsUS10157722B2Dec 18, 2018
Inspection device
EBARA CORP3 citations73
US11217421B2Jan 4, 2022
Adjustment method and electron beam device
EBARA CORP0 citations51
US9105444B2Aug 11, 2015
Electro-optical inspection apparatus and method with dust or particle collection function
EBARA CORP0 citations51
US9728374B2Aug 8, 2017
Inspection apparatus
EBARA CORP0 citations50
US9368322B2Jun 14, 2016
Inspection apparatus
EBARA CORP0 citations50
US11251017B2Feb 15, 2022
Method for evaluating secondary optical system of electron beam inspection device
EBARA CORP0 citations49