Inventor

CLAESSENS DANIEL

DE3 patents

Patents

3 patents

US11168410B2Nov 9, 2021

Susceptor for a chemical vapour deposition reactor

AIXTRON SE2 citations63

US9988712B2Jun 5, 2018

Substrate holding device

AIXTRON SE6 citations63

US10526705B2Jan 7, 2020

Methods for controlling the substrate temperature using a plurality of flushing gases

AIXTRON SE0 citations36