Inventor
BOYD ADAM
BE8 patents
⚠️ This page may combine multiple inventors who share the name “BOYD ADAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIXTRON SE
5 patentsUS11746419B2Sep 5, 2023
Shield plate for a CVD reactor
AIXTRON SE2 citations63
US11168410B2Nov 9, 2021
Susceptor for a chemical vapour deposition reactor
AIXTRON SE2 citations63
US9988712B2Jun 5, 2018
Substrate holding device
AIXTRON SE6 citations63
US12084768B2Sep 10, 2024
Method for using shield plate in a CVD reactor
AIXTRON SE0 citations53
US10526705B2Jan 7, 2020
Methods for controlling the substrate temperature using a plurality of flushing gases
AIXTRON SE0 citations36