P

Inventor

MANTRIPRAGADA SAI

US11 patents
⚠️ This page may combine multiple inventors who share the name “MANTRIPRAGADA SAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAVAS STEPHEN EDWARD

3 patents
US8697197B2Apr 15, 2014

Methods for plasma processing

SAVAS STEPHEN EDWARD23 citations89
US10049859B2Aug 14, 2018

Plasma generating units for processing a substrate

SAVAS STEPHEN EDWARD1 citations60
US8765232B2Jul 1, 2014

Apparatus and method for dielectric deposition

SAVAS STEPHEN EDWARD2 citations60

AIXTRON INC

3 patents
US9096932B2Aug 4, 2015

Methods for plasma processing

AIXTRON INC1 citations61
US9096933B2Aug 4, 2015

Methods for plasma processing

AIXTRON INC3 citations61
US9359674B2Jun 7, 2016

Apparatus and method for dielectric deposition

AIXTRON INC0 citations50

MATTSON TECH INC

2 patents
US6335293B1Jan 1, 2002

Systems and methods for two-sided etch of a semiconductor substrate

MATTSON TECH INC384 citations95
US6624082B2Sep 23, 2003

Systems and methods for two-sided etch of a semiconductor substrate

MATTSON TECH INC23 citations89

AIXTRON SE

2 patents
US9443702B2Sep 13, 2016

Methods for plasma processing

AIXTRON SE2 citations61
US10526708B2Jan 7, 2020

Methods for forming thin protective and optical layers on substrates

AIXTRON SE1 citations60

BARKER DAVID

1 patent
US7976263B2Jul 12, 2011

Integrated wafer transfer mechanism

BARKER DAVID10 citations82