Inventor

JOH SOOYUN

US13 patents

⚠️ This page may combine multiple inventors who share the name “JOH SOOYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAVAS STEPHEN EDWARD

3 patents

US8697197B2Apr 15, 2014

Methods for plasma processing

SAVAS STEPHEN EDWARD23 citations89

US10049859B2Aug 14, 2018

Plasma generating units for processing a substrate

SAVAS STEPHEN EDWARD1 citations60

US8765232B2Jul 1, 2014

Apparatus and method for dielectric deposition

SAVAS STEPHEN EDWARD2 citations60

AIXTRON INC

3 patents

US9096933B2Aug 4, 2015

Methods for plasma processing

AIXTRON INC3 citations61

US9096932B2Aug 4, 2015

Methods for plasma processing

AIXTRON INC1 citations61

US9359674B2Jun 7, 2016

Apparatus and method for dielectric deposition

AIXTRON INC0 citations50

NOVELLUS SYSTEMS INC

2 patents

US6918824B2Jul 19, 2005

Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device

NOVELLUS SYSTEMS INC22 citations92

US6758591B1Jul 6, 2004

Mixing of materials in an integrated circuit manufacturing equipment

NOVELLUS SYSTEMS INC16 citations82

AIXTRON SE

2 patents

US9443702B2Sep 13, 2016

Methods for plasma processing

AIXTRON SE2 citations61

US10526708B2Jan 7, 2020

Methods for forming thin protective and optical layers on substrates

AIXTRON SE1 citations60

NUSCALE POWER LLC

1 patent

US10147507B2Dec 4, 2018

Steam generator for a nuclear reactor

NUSCALE POWER LLC9 citations82

MERRITT NEIL J

1 patent

US8291935B1Oct 23, 2012

Flexible gas mixing manifold

MERRITT NEIL J24 citations79

GROOME JOHN T

1 patent

US9230697B2Jan 5, 2016

Steam generator for a nuclear reactor

GROOME JOHN T10 citations77