Inventor
SAKASHITA MIKIYA
JP4 patents
Patents
4 patentsUS11534886B2Dec 27, 2022
Polishing device, polishing head, polishing method, and method of manufacturing semiconductor device
KIOXIA CORP0 citations59
US10985027B2Apr 20, 2021
Method for manufacturing semiconductor device
KIOXIA CORP0 citations59
US12300499B2May 13, 2025
Polishing solution, polishing apparatus, and polishing method
KIOXIA CORP0 citations58
US11986920B2May 21, 2024
Polishing method, polishing agent and cleaning agent for polishing
KIOXIA CORP0 citations46