Inventor
TAKAHASHI TEPPEI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI TEPPEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS11571709B2Feb 7, 2023
Substrate treatment method and substrate treatment apparatus
TOKYO ELECTRON LTD0 citations56
US11036138B2Jun 15, 2021
Substrate processing apparatus, substrate processing method, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations46
US10926288B2Feb 23, 2021
Coating method, coating apparatus and recording medium
TOKYO ELECTRON LTD0 citations46