Inventor
BADGER KAREN D
US8 patents
⚠️ This page may combine multiple inventors who share the name “BADGER KAREN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS6635390B1Oct 21, 2003
Method and system for reducing particulate contamination in a pellicle air space
IBM6 citations65
US7742632B2Jun 22, 2010
Alternating phase shift mask inspection using biased inspection data
IBM2 citations60
US7450748B2Nov 11, 2008
Mask inspection process accounting for mask writer proximity correction
IBM2 citations59
US7619730B2Nov 17, 2009
Mask inspection DNIR replacement based on location of tri-tone level database images—2P shapes
IBM0 citations42
US7443497B2Oct 28, 2008
Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes)
IBM0 citations42
US7974802B2Jul 5, 2011
Photomask image inspection
IBM1 citations39