P

Inventor

GALLAGHER EMILY E

US6 patents
⚠️ This page may combine multiple inventors who share the name “GALLAGHER EMILY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GALLAGHER EMILY E

3 patents
US8748063B2Jun 10, 2014

Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks

GALLAGHER EMILY E12 citations81
US8765331B2Jul 1, 2014

Reducing edge die reflectivity in extreme ultraviolet lithography

GALLAGHER EMILY E9 citations80
US8769445B2Jul 1, 2014

Method for determining mask operation activities

GALLAGHER EMILY E0 citations39

IBM

2 patents
US7198872B2Apr 3, 2007

Light scattering EUVL mask

IBM11 citations79
US9052617B2Jun 9, 2015

Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks

IBM0 citations51

BADGER KAREN D

1 patent
US8538129B2Sep 17, 2013

Mask program defect test

BADGER KAREN D0 citations38