Inventor
SCHMIEDING RANDAL DEAN
US2 patents
Patents
2 patentsUS11600477B2Mar 7, 2023
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
APPLIED MATERIALS INC2 citations69
US12183560B2Dec 31, 2024
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
APPLIED MATERIALS INC0 citations58