Inventor
LIM MYEONG JUN
KR6 patents
Patents
6 patentsUS12412258B2Sep 9, 2025
Substrate inspecting unit and substrate treating apparatus including the same
SEMES CO LTD0 citations59
US12138913B2Nov 12, 2024
Control unit and substrate treating apparatus including the same
SEMES CO LTD0 citations59
US11338578B2May 24, 2022
Droplet inspection module and droplet inspection method
SEMES CO LTD0 citations53
US12282983B2Apr 22, 2025
Static electricity visualization system
SEMES CO LTD0 citations49
US12123903B2Oct 22, 2024
Static electricity visualization device
SEMES CO LTD0 citations49
US12472621B2Nov 18, 2025
Teaching method, program stored in the medium for executing the teaching method and transfer system
SEMES CO LTD0 citations48