P

Inventor

SVEDIN NIKLAS

SE12 patents
⚠️ This page may combine multiple inventors who share the name “SVEDIN NIKLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILEX MICROSYSTEMS AB

4 patents
US7172911B2Feb 6, 2007

Deflectable microstructure and method of manufacturing the same through bonding of wafers

SILEX MICROSYSTEMS AB20 citations88
US9718674B2Aug 1, 2017

Thin capping for MEMS devices

SILEX MICROSYSTEMS AB3 citations70
US9448401B2Sep 20, 2016

Via structure and method thereof

SILEX MICROSYSTEMS AB0 citations48
US9511999B2Dec 6, 2016

Thin film capping

SILEX MICROSYSTEMS AB0 citations39

EBEFORS THORBJORN

2 patents
US8485416B2Jul 16, 2013

Bonding process and bonded structures

EBEFORS THORBJORN8 citations79
US8866289B2Oct 21, 2014

Bonding process and bonded structures

EBEFORS THORBJORN1 citations58

EBEFORS THORBJOERN

2 patents
US8592981B2Nov 26, 2013

Via structure and method thereof

EBEFORS THORBJOERN3 citations55
US8630033B2Jan 14, 2014

Via structure and method thereof

EBEFORS THORBJOERN1 citations47

EBEFORS THORBJÖRN

2 patents
US8729713B2May 20, 2014

Via structure and method thereof

EBEFORS THORBJÖRN0 citations45
US8729685B2May 20, 2014

Bonding process and bonded structures

EBEFORS THORBJÖRN0 citations44

(unassigned)

1 patent
US6055869AMay 2, 2000

Lift force fluid flow sensor for measuring fluid flow velocities

45 citations89

Silex Microsystems AG

1 patent
US7560802B2Jul 14, 2009

Electrical connections in substrates

Silex Microsystems AG25 citations85