Inventor

NAKABOH HIROSHI

JP2 patents

Patents

2 patents

US4599241AJul 8, 1986

Method for inspecting defects of thin material film

OKI ELECTRIC IND CO LTD14 citations68

US4528216AJul 9, 1985

Process for forming heat-resistant resin films of polyimide and organosilicic reactants

OKI ELECTRIC IND CO LTD11 citations68