Inventor
OEHRLEIN GOTTLIEB S
US12 patents
⚠️ This page may combine multiple inventors who share the name “OEHRLEIN GOTTLIEB S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS5155657AOct 13, 1992
High area capacitor formation using material dependent etching
IBM124 citations98
US5244730ASep 14, 1993
Plasma deposition of fluorocarbon
IBM45 citations95
US5153813AOct 6, 1992
High area capacitor formation using dry etching
IBM59 citations95
US5637237AJun 10, 1997
Method for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability
IBM68 citations94
US5395769AMar 7, 1995
Method for controlling silicon etch depth
IBM33 citations92
US5549935AAug 27, 1996
Adhesion promotion of fluorocarbon films
IBM42 citations91
US5302420AApr 12, 1994
Plasma deposition of fluorocarbon
IBM37 citations91
UNIV MARYLAND
4 patentsUS9620382B2Apr 11, 2017
Reactor for plasma-based atomic layer etching of materials
UNIV MARYLAND9 citations83
US7470329B2Dec 30, 2008
Method and system for nanoscale plasma processing of objects
UNIV MARYLAND5 citations60
US11171013B2Nov 9, 2021
Leveraging precursor molecular composition and structure for atomic layer etching
UNIV MARYLAND0 citations46
US10790157B1Sep 29, 2020
Achieving etching selectivity for atomic layer etching processes by utilizing material-selective deposition phenomena
UNIV MARYLAND0 citations46