Inventor
CHUNG WEN-JYE
TW11 patents
Patents
11 patentsUS6143621ANov 7, 2000
Capacitor circuit structure for determining overlay error
TAIWAN SEMICONDUCTOR MFG44 citations92
US5633505AMay 27, 1997
Semiconductor wafer incorporating marks for inspecting first layer overlay shift in global alignment process
TAIWAN SEMICONDUCTOR MFG64 citations92
US5843831ADec 1, 1998
Process independent alignment system
TAIWAN SEMICONDUCTOR MFG41 citations90
US6248169B1Jun 19, 2001
Dual-cup coating apparatus
TAIWAN SEMICONDUCTOR MFG25 citations89
US5985764ANov 16, 1999
Layer independent alignment system
TAIWAN SEMICONDUCTOR MFG34 citations88
US6242757B1Jun 5, 2001
Capacitor circuit structure for determining overlay error
TAIWAN SEMICONDUCTOR MFG15 citations83
US5545570AAug 13, 1996
Method of inspecting first layer overlay shift in global alignment process
TAIWAN SEMICONDUCTOR MFG18 citations78
US6219171B1Apr 17, 2001
Apparatus and method for stepper exposure control in photography
TAIWAN SEMICONDUCTOR MFG8 citations67
US5756964AMay 26, 1998
Thermal processing apparatus
TAIWAN SEMICONDUCTOR MFG6 citations62
US5747817AMay 5, 1998
One-step method for on-line lithographic pattern inspection
TAIWAN SEMICONDUCTOR MFG0 citations51
US5733691AMar 31, 1998
One-step method for on-line lithographic pattern inspection
TAIWAN SEMICONDUCTOR MFG0 citations51