Inventor
PARKER N WILLIAM
US49 patents
⚠️ This page may combine multiple inventors who share the name “PARKER N WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FEI CO
13 patentsUS9934930B2Apr 3, 2018
High aspect ratio x-ray targets and uses of same
FEI CO19 citations93
US9040909B2May 26, 2015
System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
FEI CO10 citations84
US10366860B2Jul 30, 2019
High aspect ratio X-ray targets and uses of same
FEI CO5 citations83
US9627174B2Apr 18, 2017
Multi species ion source
FEI CO2 citations73
US9224569B2Dec 29, 2015
Multi species ion source
FEI CO4 citations73
US9159534B2Oct 13, 2015
Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source
FEI CO4 citations72
US9494516B2Nov 15, 2016
System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
FEI CO0 citations52
US9478390B2Oct 25, 2016
Integrated light optics and gas delivery in a charged particle lens
FEI CO0 citations50
US9349564B2May 24, 2016
Charged-particle lens that transmits emissions from sample
FEI CO0 citations50
US9204036B2Dec 1, 2015
Image-enhancing spotlight mode for digital microscopy
FEI CO0 citations50
US9972474B2May 15, 2018
Electron microscope with multiple types of integrated x-ray detectors arranged in an array
FEI CO1 citations49
US8907296B2Dec 9, 2014
Charged particle beam system aperture
FEI CO0 citations49
US9767984B2Sep 19, 2017
Chicane blanker assemblies for charged particle beam systems and methods of using the same
FEI CO1 citations46
MULTIBEAM SYSTEMS INC
12 patentsUS6844550B1Jan 18, 2005
Multi-beam multi-column electron beam inspection system
MULTIBEAM SYSTEMS INC142 citations97
US6617587B2Sep 9, 2003
Electron optics for multi-beam electron beam lithography tool
MULTIBEAM SYSTEMS INC104 citations95
US6977375B2Dec 20, 2005
Multi-beam multi-column electron beam inspection system
MULTIBEAM SYSTEMS INC47 citations94
US7462848B2Dec 9, 2008
Optics for generation of high current density patterned charged particle beams
MULTIBEAM SYSTEMS INC27 citations93
US7435956B2Oct 14, 2008
Apparatus and method for inspection and testing of flat panel display substrates
MULTIBEAM SYSTEMS INC23 citations93
US7227142B2Jun 5, 2007
Dual detector optics for simultaneous collection of secondary and backscattered electrons
MULTIBEAM SYSTEMS INC21 citations93
US7122795B2Oct 17, 2006
Detector optics for charged particle beam inspection system
MULTIBEAM SYSTEMS INC22 citations93
US6872958B2Mar 29, 2005
Platform positioning system
MULTIBEAM SYSTEMS INC31 citations92
US6734428B2May 11, 2004
Multi-beam multi-column electron beam inspection system
MULTIBEAM SYSTEMS INC51 citations91
US6943351B2Sep 13, 2005
Multi-column charged particle optics assembly
MULTIBEAM SYSTEMS INC43 citations88
US6738506B2May 18, 2004
Image processing system for multi-beam inspection
MULTIBEAM SYSTEMS INC24 citations87
US7456402B2Nov 25, 2008
Detector optics for multiple electron beam test system
MULTIBEAM SYSTEMS INC15 citations83
PARKER N WILLIAM
4 patentsUS8319181B2Nov 27, 2012
System and method for localization of large numbers of fluorescent markers in biological samples
PARKER N WILLIAM13 citations83
US8242457B2Aug 14, 2012
Charged particle optics with azimuthally-varying third-order aberrations for generation of shaped beams
PARKER N WILLIAM10 citations83
US9111715B2Aug 18, 2015
Charged particle energy filter
PARKER N WILLIAM8 citations76
US8710453B2Apr 29, 2014
Charged particle source with multiple selectable particle emitters
PARKER N WILLIAM0 citations51
KELLOGG SEAN
4 patentsUS8642974B2Feb 4, 2014
Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation
KELLOGG SEAN7 citations82
US9591735B2Mar 7, 2017
High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumped
KELLOGG SEAN5 citations71
US8987678B2Mar 24, 2015
Encapsulation of electrodes in solid media
KELLOGG SEAN1 citations50
US9053895B2Jun 9, 2015
System for attachment of an electrode into a plasma source
KELLOGG SEAN0 citations49