Inventor
AOKI TAIICHIRO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “AOKI TAIICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO OHKA KOGYO CO LTD
7 patentsUS6071673AJun 6, 2000
Method for the formation of resist pattern
TOKYO OHKA KOGYO CO LTD26 citations92
US6609909B2Aug 26, 2003
Heat treatment apparatus and method
TOKYO OHKA KOGYO CO LTD20 citations89
US6287067B1Sep 11, 2001
Processing unit and processing unit structure by assembling thereof
TOKYO OHKA KOGYO CO LTD8 citations72
US7166184B2Jan 23, 2007
Multi-stage type processing apparatus
TOKYO OHKA KOGYO CO LTD5 citations60
US7153365B2Dec 26, 2006
Tray for substrate
TOKYO OHKA KOGYO CO LTD6 citations60
US7569253B2Aug 4, 2009
Film-forming method
TOKYO OHKA KOGYO CO LTD0 citations50
US7300889B2Nov 27, 2007
Method for forming a coating film on a plate-like workpiece
TOKYO OHKA KOGYO CO LTD0 citations41