Inventor
DIRKS REMCO
NL9 patents
⚠️ This page may combine multiple inventors who share the name “DIRKS REMCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS10627213B2Apr 21, 2020
Statistical hierarchical reconstruction from metrology data
ASML NETHERLANDS BV2 citations71
US11429763B2Aug 30, 2022
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations61
US10592618B2Mar 17, 2020
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
ASML NETHERLANDS BV1 citations61
US11392043B2Jul 19, 2022
Method and metrology apparatus for determining estimated scattered radiation intensity
ASML NETHERLANDS BV0 citations60
US11994806B2May 28, 2024
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV0 citations48
US11556060B2Jan 17, 2023
Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus
ASML NETHERLANDS BV0 citations48
US10151985B2Dec 11, 2018
Process flagging and cluster detection without requiring reconstruction
ASML NETHERLANDS BV0 citations39