Inventor
SAGA KOICHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SAGA KOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
8 patentsUS5679171AOct 21, 1997
Method of cleaning substrate
SONY CORP78 citations92
US6536136B2Mar 25, 2003
Substrate transfer apparatus and substrate method
SONY CORP31 citations91
US6267158B1Jul 31, 2001
Sealed container, storage apparatus, electronic part conveyance system, and method of storage and conveyance of electronic parts
SONY CORP34 citations91
US6044874AApr 4, 2000
Sealed container and sealed container ambient gas substitution apparatus and method
SONY CORP47 citations91
US6533000B2Mar 18, 2003
Substrate transportation container
SONY CORP14 citations82
US7767585B2Aug 3, 2010
Method of cleaning and process for producing semiconductor device
SONY CORP2 citations60
US7670496B2Mar 2, 2010
Process for producing structural body and etchant for silicon oxide film
SONY CORP2 citations58
US10734386B2Aug 4, 2020
Memory element and manufacturing method of memory element
SONY CORP0 citations51