Inventor
HSU SHU-YA
TW3 patents
Patents
3 patentsUS6602792B2Aug 5, 2003
Method for reducing stress of sidewall oxide layer of shallow trench isolation
MACRONIX INT CO LTD21 citations86
US6503815B1Jan 7, 2003
Method for reducing stress and encroachment of sidewall oxide layer of shallow trench isolation
MACRONIX INT CO LTD13 citations77
US6703322B2Mar 9, 2004
Method of forming multiple oxide layers with different thicknesses in a linear nitrogen doping process
MACRONIX INT CO LTD0 citations36