Inventor
MIZOHATA YASUHIRO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MIZOHATA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
8 patentsUS5638687AJun 17, 1997
Substrate cooling method and apparatus
DAINIPPON SCREEN MFG40 citations92
US7337677B2Mar 4, 2008
Differential pressure flowmeter, flow controller, and apparatus for processing substrate
DAINIPPON SCREEN MFG28 citations91
US6958113B2Oct 25, 2005
Plating apparatus and plating method
DAINIPPON SCREEN MFG26 citations89
US7396199B2Jul 8, 2008
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG18 citations83
US7169269B2Jan 30, 2007
Plating apparatus, plating cup and cathode ring
DAINIPPON SCREEN MFG11 citations82
US7279079B2Oct 9, 2007
Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method
DAINIPPON SCREEN MFG2 citations61
US7409864B2Aug 12, 2008
Pressure sensor and substrate processing apparatus
DAINIPPON SCREEN MFG4 citations59
US7204916B2Apr 17, 2007
Plating apparatus and plating method
DAINIPPON SCREEN MFG0 citations40