Inventor

ADACHI HIKARU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “ADACHI HIKARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US7723241B2May 25, 2010

Plasma processing method and computer storage medium

TOKYO ELECTRON LTD8 citations83

US7226524B2Jun 5, 2007

Plasma processing apparatus

TOKYO ELECTRON LTD12 citations82

US9702913B2Jul 11, 2017

Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method

TOKYO ELECTRON LTD2 citations72

US7910495B2Mar 22, 2011

Plasma oxidizing method, plasma processing apparatus, and storage medium

TOKYO ELECTRON LTD5 citations61

US7897518B2Mar 1, 2011

Plasma processing method and computer storage medium

TOKYO ELECTRON LTD4 citations61

MATSUYAMA SEIJI

1 patent

US8183165B2May 22, 2012

Plasma processing method

MATSUYAMA SEIJI0 citations48