Inventor

BLACKBURN JASON M

US8 patents

⚠️ This page may combine multiple inventors who share the name “BLACKBURN JASON M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

5 patents

US7211509B1May 1, 2007

Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compounds

NOVELLUS SYSTEMS INC82 citations96

US7041596B1May 9, 2006

Surface treatment using iodine plasma to improve metal deposition

NOVELLUS SYSTEMS INC25 citations89

US7279417B1Oct 9, 2007

Use of metallocenes to inhibit copper oxidation during semiconductor processing

NOVELLUS SYSTEMS INC2 citations61

US7456101B1Nov 25, 2008

Method for enhancing the nucleation and morphology of ruthenium films on dielectric substrates using amine containing compounds

NOVELLUS SYSTEMS INC2 citations60

US6884737B1Apr 26, 2005

Method and apparatus for precursor delivery utilizing the melting point depression of solid deposition precursors in the presence of supercritical fluids

NOVELLUS SYSTEMS INC6 citations60

UNIV MASSACHUSETTS

3 patents

US6689700B1Feb 10, 2004

Chemical fluid deposition method for the formation of metal and metal alloy films on patterned and unpatterned substrates

UNIV MASSACHUSETTS66 citations93

US6992018B2Jan 31, 2006

Chemical fluid deposition for the formation of metal and metal alloy films on patterned and unpatterned substrates

UNIV MASSACHUSETTS12 citations81

US6984584B2Jan 10, 2006

Contamination suppression in chemical fluid deposition

UNIV MASSACHUSETTS4 citations56