Inventor
SANTHANAM KARTIK
US9 patents
⚠️ This page may combine multiple inventors who share the name “SANTHANAM KARTIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUSD959490SAug 2, 2022
Display screen or portion thereof with graphical user interface
APPLIED MATERIALS INC36 citations89
US11735447B2Aug 22, 2023
Enhanced process and hardware architecture to detect and correct realtime product substrates
APPLIED MATERIALS INC2 citations71
US7659184B2Feb 9, 2010
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC3 citations61
US8927400B2Jan 6, 2015
Safe handling of low energy, high dose arsenic, phosphorus, and boron implanted wafers
APPLIED MATERIALS INC1 citations51
US8003500B2Aug 23, 2011
Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking
APPLIED MATERIALS INC1 citations51
US7989329B2Aug 2, 2011
Removal of surface dopants from a substrate
APPLIED MATERIALS INC1 citations51
US7968401B2Jun 28, 2011
Reducing photoresist layer degradation in plasma immersion ion implantation
APPLIED MATERIALS INC0 citations50
US7723219B2May 25, 2010
Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition
APPLIED MATERIALS INC0 citations35