P

Inventor

YIN HEYUN

US6 patents
⚠️ This page may combine multiple inventors who share the name “YIN HEYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PAPASOULIOTIS GEORGE D

3 patents
US8202792B2Jun 19, 2012

Method of processing a substrate having a non-planar surface

PAPASOULIOTIS GEORGE D7 citations82
US8679960B2Mar 25, 2014

Technique for processing a substrate having a non-planar surface

PAPASOULIOTIS GEORGE D3 citations61
US8507372B2Aug 13, 2013

Method for processing a substrate having a non-planar substrate surface

PAPASOULIOTIS GEORGE D2 citations61

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents
US7863194B2Jan 4, 2011

Implantation of multiple species to address copper reliability

VARIAN SEMICONDUCTOR EQUIPMENT9 citations83
US7737013B2Jun 15, 2010

Implantation of multiple species to address copper reliability

VARIAN SEMICONDUCTOR EQUIPMENT5 citations73

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

1 patent
US10002764B1Jun 19, 2018

Sputter etch material selectivity

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51