Inventor

TAKUSHIMA TAKERU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “TAKUSHIMA TAKERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUDA SHUHEI

1 patent

US8877643B2Nov 4, 2014

Method of polishing a silicon wafer

MATSUDA SHUHEI2 citations56

KATOH TAKEO

1 patent

US8147295B2Apr 3, 2012

Method of polishing silicon wafer

KATOH TAKEO4 citations54