Inventor
VAN SCHOOT JAN BERNARD PLECHELMUS
NL40 patents
⚠️ This page may combine multiple inventors who share the name “VAN SCHOOT JAN BERNARD PLECHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
18 patentsUS9618859B2Apr 11, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9785051B2Oct 10, 2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV5 citations72
US9411238B2Aug 9, 2016
Source-collector device, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV4 citations72
US9986628B2May 29, 2018
Method and apparatus for generating radiation
ASML NETHERLANDS BV2 citations71
US7961293B2Jun 14, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations71
US9835950B2Dec 5, 2017
Radiation source
ASML NETHERLANDS BV4 citations66
US7889321B2Feb 15, 2011
Illumination system for illuminating a patterning device and method for manufacturing an illumination system
ASML NETHERLANDS BV2 citations63
US10248027B2Apr 2, 2019
Projection system
ASML NETHERLANDS BV1 citations56
US9989863B2Jun 5, 2018
Lithographic system
ASML NETHERLANDS BV0 citations52
US12099306B2Sep 24, 2024
Method for controlling a lithographic system
ASML NETHERLANDS BV0 citations51
US10001709B2Jun 19, 2018
Lithographic apparatus, spectral purity filter and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9363879B2Jun 7, 2016
Module and method for producing extreme ultraviolet radiation
ASML NETHERLANDS BV0 citations51
US10289006B2May 14, 2019
Beam delivery for EUV lithography
ASML NETHERLANDS BV0 citations50
US9285685B2Mar 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9860966B2Jan 2, 2018
Radiation source
ASML NETHERLANDS BV0 citations48
US7816658B2Oct 19, 2010
Extreme ultra-violet lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations42
US9958787B2May 1, 2018
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations40
US10558126B2Feb 11, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations39
VAN SCHOOT JAN BERNARD PLECHELMUS
4 patentsUS9170500B2Oct 27, 2015
Lithographic apparatus and device manufacturing method with corrective positioning of reflective element
VAN SCHOOT JAN BERNARD PLECHELMUS10 citations81
US9632419B2Apr 25, 2017
Radiation source
VAN SCHOOT JAN BERNARD PLECHELMUS2 citations68
US8830444B2Sep 9, 2014
Lithographic apparatus and method
VAN SCHOOT JAN BERNARD PLECHELMUS0 citations48
US8570489B2Oct 29, 2013
Lithographic projection apparatus and method of compensating perturbation factors
VAN SCHOOT JAN BERNARD PLECHELMUS0 citations39
LOOPSTRA ERIK ROELOF
3 patentsUS9164401B2Oct 20, 2015
Projection system and lithographic apparatus
LOOPSTRA ERIK ROELOF2 citations62
US9414477B2Aug 9, 2016
Radiation source, lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF1 citations52
US9134629B2Sep 15, 2015
Illumination system, lithographic apparatus and method of forming an illumination mode
LOOPSTRA ERIK ROELOF0 citations51
NIENHUYS HAN-KWANG
2 patentsVAN DE VIJVER YURI JOHANNES GABRIEL
2 patentsDE VRIES GOSSE CHARLES
2 patentsUS9372413B2Jun 21, 2016
Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices
DE VRIES GOSSE CHARLES2 citations60
US8867021B2Oct 21, 2014
Illumination system, lithographic apparatus and method of adjusting an illumination mode
DE VRIES GOSSE CHARLES0 citations48
BANINE VADIM YEVGENYEVICH
2 patentsUS9097982B2Aug 4, 2015
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter
BANINE VADIM YEVGENYEVICH0 citations51
US9594306B2Mar 14, 2017
Lithographic apparatus, spectral purity filter and device manufacturing method
BANINE VADIM YEVGENYEVICH0 citations49