Inventor

BOUCHOMS IGOR PETRUS MARIA

NL4 patents

⚠️ This page may combine multiple inventors who share the name “BOUCHOMS IGOR PETRUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7751027B2Jul 6, 2010

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV18 citations82

US10156791B2Dec 18, 2018

Lithographic apparatus and method

ASML NETHERLANDS BV2 citations67

JACOBS JOHANNES HENRICUS WILHELMUS

1 patent

US9268236B2Feb 23, 2016

Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder

JACOBS JOHANNES HENRICUS WILHELMUS5 citations81

VAN SCHOOT JAN BERNARD PLECHELMUS

1 patent

US8830444B2Sep 9, 2014

Lithographic apparatus and method

VAN SCHOOT JAN BERNARD PLECHELMUS0 citations48