Inventor
EURLINGS MARKUS FRANCISCUS ANTONIUS
NL20 patents
⚠️ This page may combine multiple inventors who share the name “EURLINGS MARKUS FRANCISCUS ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7525642B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV32 citations92
US9835950B2Dec 5, 2017
Radiation source
ASML NETHERLANDS BV4 citations66
US10222702B2Mar 5, 2019
Radiation source
ASML NETHERLANDS BV1 citations58
US11150563B2Oct 19, 2021
Method of measuring a parameter of a patterning process, metrology apparatus, target
ASML NETHERLANDS BV1 citations57
US10495889B2Dec 3, 2019
Beam homogenizer, illumination system and metrology system
ASML NETHERLANDS BV0 citations51
US10222703B2Mar 5, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US9778575B2Oct 3, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US10289006B2May 14, 2019
Beam delivery for EUV lithography
ASML NETHERLANDS BV0 citations50
US9645500B2May 9, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations40
ASML MASKTOOLS BV
3 patentsUS7666554B2Feb 23, 2010
Method and apparatus for performing model-based layout conversion for use with dipole illumination
ASML MASKTOOLS BV11 citations83
US7985515B2Jul 26, 2011
Method and apparatus for performing model-based layout conversion for use with dipole illumination
ASML MASKTOOLS BV0 citations51
US7856606B2Dec 21, 2010
Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems
ASML MASKTOOLS BV1 citations47