Inventor
YE ZHENGMAO
US16 patents
⚠️ This page may combine multiple inventors who share the name “YE ZHENGMAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
10 patentsUS11104057B2Aug 31, 2021
Imprint apparatus and method of imprinting a partial field
CANON KK3 citations73
US10663869B2May 26, 2020
Imprint system and imprinting process with spatially non-uniform illumination
CANON KK4 citations72
US10468247B2Nov 5, 2019
Fluid droplet methodology and apparatus for imprint lithography
CANON KK2 citations72
US10335984B2Jul 2, 2019
Imprint apparatus and article manufacturing method
CANON KK3 citations72
US10095106B2Oct 9, 2018
Removing substrate pretreatment compositions in nanoimprint lithography
CANON KK6 citations72
US11247459B2Feb 15, 2022
Liquid charging apparatus, liquid charging method, and manufacturing method
CANON KK1 citations62
US10549313B2Feb 4, 2020
Edge field imprint lithography
CANON KK1 citations61
US10035296B2Jul 31, 2018
Methods for controlling spread of imprint material
CANON KK1 citations51
US11951660B2Apr 9, 2024
Shaping system including an evaporation cover, shaping process, and method of manufacturing an article
CANON KK0 citations50
US10199244B2Feb 5, 2019
Imprint apparatus, and method of manufacturing article
CANON KK0 citations41