Inventor
FARRELL RICHARD A
US15 patents
⚠️ This page may combine multiple inventors who share the name “FARRELL RICHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
13 patentsUS8853101B1Oct 7, 2014
Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithography
GLOBALFOUNDRIES INC13 citations83
US9613807B2Apr 4, 2017
Methods for fabricating integrated circuits using directed self-assembly chemoepitaxy
GLOBALFOUNDRIES INC2 citations72
US8906802B2Dec 9, 2014
Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly process
GLOBALFOUNDRIES INC5 citations72
US8889343B2Nov 18, 2014
Optimizing lithographic processes using laser annealing techniques
GLOBALFOUNDRIES INC6 citations72
US9508562B2Nov 29, 2016
Sidewall image templates for directed self-assembly materials
GLOBALFOUNDRIES INC2 citations62
US9530689B2Dec 27, 2016
Methods for fabricating integrated circuits using multi-patterning processes
GLOBALFOUNDRIES INC2 citations61
US9478506B2Oct 25, 2016
Multilayer pattern transfer for chemical guides
GLOBALFOUNDRIES INC2 citations61
US10685847B2Jun 16, 2020
Vertical nanowires formed on upper fin surface
GLOBALFOUNDRIES INC0 citations52
US9698025B2Jul 4, 2017
Directed self-assembly material growth mask for forming vertical nanowires
GLOBALFOUNDRIES INC0 citations52
US9275896B2Mar 1, 2016
Methods for fabricating integrated circuits using directed self-assembly
GLOBALFOUNDRIES INC1 citations51
US10186577B2Jan 22, 2019
Multiple directed self-assembly material mask patterning for forming vertical nanowires
GLOBALFOUNDRIES INC0 citations42
US9865682B2Jan 9, 2018
Directed self-assembly material etch mask for forming vertical nanowires
GLOBALFOUNDRIES INC0 citations42
US8969207B2Mar 3, 2015
Methods of forming a masking layer for patterning underlying structures
GLOBALFOUNDRIES INC0 citations41