Inventor
SCHMID GERARD M
US25 patents
⚠️ This page may combine multiple inventors who share the name “SCHMID GERARD M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
9 patentsUS8790522B1Jul 29, 2014
Chemical and physical templates for forming patterns using directed self-assembly materials
GLOBALFOUNDRIES INC20 citations90
US8853101B1Oct 7, 2014
Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithography
GLOBALFOUNDRIES INC13 citations83
US8956808B2Feb 17, 2015
Asymmetric templates for forming non-periodic patterns using directed self-assembly materials
GLOBALFOUNDRIES INC11 citations82
US8906802B2Dec 9, 2014
Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly process
GLOBALFOUNDRIES INC5 citations72
US8889343B2Nov 18, 2014
Optimizing lithographic processes using laser annealing techniques
GLOBALFOUNDRIES INC6 citations72
US9508562B2Nov 29, 2016
Sidewall image templates for directed self-assembly materials
GLOBALFOUNDRIES INC2 citations62
US9478506B2Oct 25, 2016
Multilayer pattern transfer for chemical guides
GLOBALFOUNDRIES INC2 citations61
US9455154B2Sep 27, 2016
Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patterns
GLOBALFOUNDRIES INC0 citations52
US8969207B2Mar 3, 2015
Methods of forming a masking layer for patterning underlying structures
GLOBALFOUNDRIES INC0 citations41
MOLECULAR IMPRINTS INC
6 patentsUS7547398B2Jun 16, 2009
Self-aligned process for fabricating imprint templates containing variously etched features
MOLECULAR IMPRINTS INC20 citations90
US8012395B2Sep 6, 2011
Template having alignment marks formed of contrast material
MOLECULAR IMPRINTS INC17 citations83
US11161280B2Nov 2, 2021
Strain and kinetics control during separation phase of imprint process
MOLECULAR IMPRINTS INC1 citations62
US11020894B2Jun 1, 2021
Safe separation for nano imprinting
MOLECULAR IMPRINTS INC0 citations62
US7985530B2Jul 26, 2011
Etch-enhanced technique for lift-off patterning
MOLECULAR IMPRINTS INC1 citations52
US7906274B2Mar 15, 2011
Method of creating a template employing a lift-off process
MOLECULAR IMPRINTS INC0 citations41