Inventor

LIU GUAN-HENG

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LIU GUAN-HENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US10162277B2Dec 25, 2018

Extreme ultraviolet lithography system with debris trapper on exhaust line

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68

TAIWAN SEMICONDUCTOR MFG

1 patent

US7169469B2Jan 30, 2007

Particle-removing wafer

TAIWAN SEMICONDUCTOR MFG3 citations49