P

Inventor

CHUNG JEN-YANG

TW21 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG JEN-YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

15 patents
US10274844B1Apr 30, 2019

Lithography apparatus and method for protecting a reticle

TAIWAN SEMICONDUCTOR MFG CO LTD13 citations84
US11832372B2Nov 28, 2023

EUV light source and apparatus for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11272606B2Mar 8, 2022

EUV light source and apparatus for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10969690B2Apr 6, 2021

Extreme ultraviolet control system for adjusting droplet illumination parameters

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10880981B2Dec 29, 2020

Collector pellicle

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11592754B2Feb 28, 2023

Advanced load port for photolithography mask inspection tool

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10162277B2Dec 25, 2018

Extreme ultraviolet lithography system with debris trapper on exhaust line

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68
US12167525B2Dec 10, 2024

EUV light source and apparatus for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12044975B2Jul 23, 2024

Extreme ultraviolet control system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11467498B2Oct 11, 2022

Extreme ultraviolet control system

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12298664B2May 13, 2025

Advanced load port for photolithography mask inspection tool

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11921431B2Mar 5, 2024

Advanced load port for photolithography mask inspection tool

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10877190B2Dec 29, 2020

Extreme ultraviolet radiation source

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11237482B2Feb 1, 2022

Process system and operating method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10685846B2Jun 16, 2020

Semiconductor integrated circuit fabrication with pattern-reversing process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41

AU OPTRONICS CORP

6 patents