Inventor
CHUNG JEN-YANG
TW21 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG JEN-YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
15 patentsUS10274844B1Apr 30, 2019
Lithography apparatus and method for protecting a reticle
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations84
US11832372B2Nov 28, 2023
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11272606B2Mar 8, 2022
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10969690B2Apr 6, 2021
Extreme ultraviolet control system for adjusting droplet illumination parameters
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10880981B2Dec 29, 2020
Collector pellicle
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11592754B2Feb 28, 2023
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10162277B2Dec 25, 2018
Extreme ultraviolet lithography system with debris trapper on exhaust line
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68
US12167525B2Dec 10, 2024
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12044975B2Jul 23, 2024
Extreme ultraviolet control system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11467498B2Oct 11, 2022
Extreme ultraviolet control system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12298664B2May 13, 2025
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11921431B2Mar 5, 2024
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10877190B2Dec 29, 2020
Extreme ultraviolet radiation source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11237482B2Feb 1, 2022
Process system and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10685846B2Jun 16, 2020
Semiconductor integrated circuit fabrication with pattern-reversing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
AU OPTRONICS CORP
6 patentsUS9116394B2Aug 25, 2015
Display panel
AU OPTRONICS CORP1 citations51
US9146430B2Sep 29, 2015
Pixel structure and liquid crystal display panel having the same
AU OPTRONICS CORP0 citations50
US9257076B2Feb 9, 2016
Pixel driving method and liquid crystal display implementing the same
AU OPTRONICS CORP1 citations49
US9146423B2Sep 29, 2015
Pixel structure
AU OPTRONICS CORP0 citations40
US9541796B2Jan 10, 2017
Pixel array substrate and liquid crystal display panel
AU OPTRONICS CORP0 citations39
US9250484B2Feb 2, 2016
Active device array substrate
AU OPTRONICS CORP0 citations39