P

Inventor

SHIBATA YUKIHIRO

JP95 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATA YUKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

23 patents
US6947587B1Sep 20, 2005

Defect inspection method and apparatus

HITACHI LTD88 citations99
US6621571B1Sep 16, 2003

Method and apparatus for inspecting defects in a patterned specimen

HITACHI LTD149 citations99
US6690469B1Feb 10, 2004

Method and apparatus for observing and inspecting defects

HITACHI LTD98 citations98
US6556290B2Apr 29, 2003

Defect inspection method and apparatus therefor

HITACHI LTD75 citations98
US6169282B1Jan 2, 2001

Defect inspection method and apparatus therefor

HITACHI LTD107 citations98
US6091075AJul 18, 2000

Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus

HITACHI LTD99 citations98
US6762831B2Jul 13, 2004

Method and apparatus for inspecting defects

HITACHI LTD45 citations96
US6400454B1Jun 4, 2002

Apparatus and method for inspector defects

HITACHI LTD67 citations96
US5684565ANov 4, 1997

Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system

HITACHI LTD57 citations96
US5302999AApr 12, 1994

Illumination method, illumination apparatus and projection exposure apparatus

HITACHI LTD91 citations94
US7274813B2Sep 25, 2007

Defect inspection method and apparatus

HITACHI LTD18 citations93
US7161671B2Jan 9, 2007

Method and apparatus for inspecting defects

HITACHI LTD16 citations93
US7142294B2Nov 28, 2006

Method and apparatus for detecting defects

HITACHI LTD22 citations93
US6850320B2Feb 1, 2005

Method for inspecting defects and an apparatus for the same

HITACHI LTD26 citations93
US6674890B2Jan 6, 2004

Defect inspection method and apparatus therefor

HITACHI LTD41 citations93
US6654112B2Nov 25, 2003

Apparatus and method for inspecting defects

HITACHI LTD16 citations93
US7251024B2Jul 31, 2007

Defect inspection method and apparatus therefor

HITACHI LTD10 citations84
US7173693B2Feb 6, 2007

Method for inspecting defects and an apparatus of the same

HITACHI LTD11 citations84
US7092095B2Aug 15, 2006

Method and apparatus for observing and inspecting defects

HITACHI LTD11 citations84
US7916929B2Mar 29, 2011

Defect inspection method and apparatus

HITACHI LTD5 citations74
US7512259B2Mar 31, 2009

Defect inspection method and apparatus

HITACHI LTD7 citations74
US7440092B2Oct 21, 2008

Method and apparatus for detecting defects

HITACHI LTD7 citations74
US6819416B2Nov 16, 2004

Defect inspection method and apparatus therefor

HITACHI LTD12 citations74

HITACHI HIGH TECH CORP

16 patents
US7714997B2May 11, 2010

Apparatus for inspecting defects

HITACHI HIGH TECH CORP22 citations93
US7599545B2Oct 6, 2009

Method and its apparatus for inspecting defects

HITACHI HIGH TECH CORP27 citations93
US7508973B2Mar 24, 2009

Method of inspecting defects

HITACHI HIGH TECH CORP37 citations93
US7400393B2Jul 15, 2008

Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen

HITACHI HIGH TECH CORP28 citations93
US8004666B2Aug 23, 2011

Apparatus for inspecting defects

HITACHI HIGH TECH CORP10 citations84
US7859656B2Dec 28, 2010

Defect inspection method and system

HITACHI HIGH TECH CORP15 citations84
US7826047B2Nov 2, 2010

Apparatus and method for optical inspection

HITACHI HIGH TECH CORP15 citations84
US7492452B2Feb 17, 2009

Defect inspection method and system

HITACHI HIGH TECH CORP13 citations84
US7463350B2Dec 9, 2008

Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal

HITACHI HIGH TECH CORP17 citations84
US7372561B2May 13, 2008

Method and apparatus for inspecting defects and a system for inspecting defects

HITACHI HIGH TECH CORP15 citations84
US7359044B2Apr 15, 2008

Method and apparatus for inspecting pattern defects

HITACHI HIGH TECH CORP17 citations84
US9976966B2May 22, 2018

Defect inspection method and its device

HITACHI HIGH TECH CORP3 citations73
US9523648B2Dec 20, 2016

Defect inspection device and defect inspection method

HITACHI HIGH TECH CORP3 citations73
US9513228B2Dec 6, 2016

Defect inspection method and its device

HITACHI HIGH TECH CORP3 citations73
US9329137B2May 3, 2016

Defect inspection method and device using same

HITACHI HIGH TECH CORP4 citations73
US9310318B2Apr 12, 2016

Defect inspection method and defect inspection device

HITACHI HIGH TECH CORP3 citations73

SHARP KK

3 patents
US5583543ADec 10, 1996

Pen input processing apparatus

SHARP KK208 citations98
US5329289AJul 12, 1994

Data processor with rotatable display

SHARP KK229 citations96
US5614926AMar 25, 1997

Word processor with a handwriting text processing function

SHARP KK15 citations73

SHIBATA YUKIHIRO

3 patents
US8416402B2Apr 9, 2013

Method and apparatus for inspecting defects

SHIBATA YUKIHIRO6 citations84
US8228494B2Jul 24, 2012

Apparatus for inspecting defects

SHIBATA YUKIHIRO13 citations84
US8454754B2Jun 4, 2013

Cleaning method and method for manufacturing electronic device

SHIBATA YUKIHIRO6 citations73

URANO YUTA

2 patents
US8922764B2Dec 30, 2014

Defect inspection method and defect inspection apparatus

URANO YUTA12 citations84
US8804110B2Aug 12, 2014

Fault inspection device and fault inspection method

URANO YUTA4 citations73

MAEDA SHUNJI

1 patent
US8107717B2Jan 31, 2012

Defect inspection method and apparatus

MAEDA SHUNJI14 citations92

MANNOH KOGOY CO LTD

1 patent
US6132162AOct 17, 2000

Storage construction for spare tire of motor vehicle

MANNOH KOGOY CO LTD21 citations87

TANIGUCHI ATSUSHI

1 patent
US8830465B2Sep 9, 2014

Defect inspecting apparatus and defect inspecting method

TANIGUCHI ATSUSHI7 citations83

Showing the top 50 of 95 patents by PatentIndex Score.